#High-NA EUV

AI Chips

ASML's 135 Wafers an Hour Is an Acceptance Test, Not Fab Output

High-NA EUV fleet numbers were updated at SEMICON Taiwan: past 1.35 million wafers exposed, 84% availability. The throughput figure everyone is quoting came off a qualification run.

4d ago

AI Chips

North America's First Publicly Owned High-NA EUV Machine Starts Arriving in Albany

The base module of a roughly $400 million ASML system landed at the Albany NanoTech Complex, where a $10 billion partnership will open next-generation lithography to researchers who could never buy one.

Jul 22, 2026